the development opportunities and challenges of the borophosphosilicate glass (bpsg) industry coexist and there is huge room for future growth.

boro-phospho-silicate glass, or bpsg for short, refers to a silicon oxide layer formed by simultaneously doping phosphorus impurities and boron impurities into silicon dioxide (sio2). it is often used in the front-end manufacturing process of semiconductor chips. the front-end manufacturing process of semiconductor chips mainly includes oxidation diffusion, thin film deposition, glue development, photolithography, ion…

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