my country is highly dependent on imports of electronic grade dichlorosilane, and there is broad room for domestic substitution in the future.
under normal temperatures and pressures, dichlorosilane is a colorless, toxic gas with a pungent suffocating odor and corrosiveness. it is flammable and generates hydrogen chloride and silicon oxide after combustion and oxidation. dichlorosilane is soluble in benzene, ether and carbon tetrachloride, and hydrolyzes when in contact with water to form hydrochloric acid, which is transported…
