electronic grade disilane (si2h6) industry standards continue to improve, and there is huge room for domestic substitution in the chinese market
electronic grade disilane (si2h6) is a special electronic gas. it usually uses monosilane as raw material and is produced through processes such as glow discharge, cooling recovery, and low-temperature distillation. electronic grade disilane has a high silicon content and has the advantages of low deposition temperature and fast deposition speed. it is widely used in…
