and the localization level of electronic-grade UPW equipment needs to be improved.

ultrapure water, also known as upw, refers to water with a resistivity of 18mω*cm (25℃). ultrapure water is water produced for the purpose of developing ultrapure materials. the water contains almost no impurities except hydrogen ions and hydroxide ions. ultrapure water has a wide range of applications, including electronics, medical treatment, scientific experiments, precision instruments,…